METHOD OF MANUFACTURING GROUP III NITRIDE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a group III nitride capable of obtaining the group III nitride at low temperature and pressure. SOLUTION: The method for manufacturing the group III nitride yields the group III nitride by reacting one kind of a group III raw material substance or a mixture of a plurality of kinds of group III raw material substances; and an alkali metal nitride in an oxygen-free atmosphere. Aluminum oxide, gallium oxide or indium oxide is preferably used for the group III raw material substance. The oxygen-free atmosphere can be formed of an inert gas such as nitrogen, argon or helium. COPYRIGHT: (C)2005,JPO&NCIPI