| 发明名称 |
Dry film remove pre-filter system |
| 摘要 |
In accordance with the objectives of the invention a new method and apparatus is provided for the removal of by-products resulting from a dry-film removal process. The conventional method and apparatus for controlling a dry-film removal process is extended by the addition of a Dry-Film Remove Pre-Filter System, which significantly enhances the capability of filtering a dry-film removal solution.
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| 申请公布号 |
US2005130437(A1) |
申请公布日期 |
2005.06.16 |
| 申请号 |
US20030736948 |
申请日期 |
2003.12.16 |
| 申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO. |
发明人 |
TSENG CHIH-MIN;PENG CHIEN-HSUN;WANG SZU-YAO;LO CHUN-YEN |
| 分类号 |
C11D7/34;C11D11/00;H01L21/00;H01L21/302;H01L21/311;H01L21/461;(IPC1-7):H01L21/302 |
主分类号 |
C11D7/34 |
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