| 摘要 |
A pressure sensor is a micro-electro-mechanical vibrating device, with a silicon substrate ( 15; 15 ') onto which a single-layer or multilayer vibrating assembly ( 121; 221; 321 ) is formed. It comprises an electrode ( 21; 21 '), which makes the assembly to oscillate relative to the substrate at the resonance frequency or at another known frequency, and a detector for detecting the actual frequency and/or amplitude of said oscillation. The actual frequency and/or amplitude are affected by the conditions, in particular the pressure, of the external environment and the variations of the frequency and amplitude with respect to the values set by the electrode is used to measure pressure variations in the surrounding environment.
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