VACUUM TRAP FOR SEMICONDUCTOR EQUIPMENT,申请号KR20030090320-传众专利搜索

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发明名称	VACUUM TRAP FOR SEMICONDUCTOR EQUIPMENT
摘要
申请公布号	KR20050058073(A)	申请公布日期	2005.06.16
申请号	KR20030090320	申请日期	2003.12.11
申请人	DONGBUANAM SEMICONDUCTOR INC.	发明人	SEO, SEONG SOO;KIM, TAE HWAN
分类号	H01L21/02;(IPC1-7):H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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