SUBSTRATE SUPPORT APPARATUS FOR A SUBSTRATE HOUSING,申请号KR19980706037-传众专利搜索

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发明名称	SUBSTRATE SUPPORT APPARATUS FOR A SUBSTRATE HOUSING
摘要
申请公布号	KR100482237(B1)	申请公布日期	2005.06.16
申请号	KR19980706037	申请日期	1998.08.05
申请人		发明人
分类号	H05K7/14;A47F7/00;H01L21/68;(IPC1-7):H05K7/14	主分类号	H05K7/14
代理机构		代理人
主权项
地址

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