发明名称 |
METHODS AND SYSTEMS FOR CONTROLLING RETICLE-INDUCED ERRORS |
摘要 |
<p>Systems and methods for controlling at least one reticle-induced error in a process system, the systems and methods including adjusting measurement data associated with the process system, where the adjustment can be based on at least one reticle identifier (ID) associated with the measurement data, and reticle-induced error data associated with the at least one reticle ID. The methods and systems also include combining the adjusted measurement data to compute at least one control for the process system.</p> |
申请公布号 |
EP1540424(A2) |
申请公布日期 |
2005.06.15 |
申请号 |
EP20030791739 |
申请日期 |
2003.08.22 |
申请人 |
INFICON LT, INC. |
发明人 |
PELLEGRINI, JOSEPH;CROW, DAVID;JOUBERT, ETIENNE |
分类号 |
G05B19/418;(IPC1-7):G03F7/20 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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