发明名称 Ferroelectric memory transistor and method for forming the same
摘要 An object of the present invention is to provide a non-volatile ferroelectric memory device, which eliminates leakage-related transistor memory retention degradation. A ferroelectric memory transistor according to the present invention comprises: a substrate having a source region (54), a gate region (58), and a drain region (56); a gate stack (60) located on the gate region, including: a high-k insulator element (62), including a first high-k cup (62L) and a second high-k cup (62U); a ferroelectric element (64), wherein said ferroelectric element is encapsulated within said high-k insulator element (62); and a top electrode (66) located on a top portion of said high-k insulator element; a passivation oxide layer (68) located over the substrate and gate stack; and metalizations (70,74,72) to form respective contacts to the source region, the drain region and the gate stack. <IMAGE>
申请公布号 EP1369926(A3) 申请公布日期 2005.06.15
申请号 EP20030253199 申请日期 2003.05.22
申请人 SHARP KABUSHIKI KAISHA 发明人 HSU, SHENG TENG;ZHANG, FENGYAN;LI, TINGKAI
分类号 H01L27/105;G11C11/22;H01L21/28;H01L21/316;H01L21/8246;H01L21/8247;H01L27/115;H01L29/78;H01L29/788;H01L29/792;(IPC1-7):H01L29/423;H01L21/824 主分类号 H01L27/105
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