CONICAL BAFFLE FOR REDUCING CHARGING DRIFT IN A PARTICLE BEAM SYSTEM,申请号EP19970909879-传众专利搜索

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发明名称	CONICAL BAFFLE FOR REDUCING CHARGING DRIFT IN A PARTICLE BEAM SYSTEM
摘要
申请公布号	EP0875072(B1)	申请公布日期	2005.06.15
申请号	EP19970909879	申请日期	1997.10.07
申请人	APPLIED MATERIALS, INC.	发明人	VENEKLASEN, LEE, H.;YOUNG, LYDIA, J.
分类号	H01J37/09;H01J37/147;(IPC1-7):H01J37/09	主分类号	H01J37/09
代理机构		代理人
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