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经营范围
发明名称
Scanning particle mirror microscope
摘要
申请公布号
EP1255278(B1)
申请公布日期
2005.06.15
申请号
EP20010109943
申请日期
2001.04.24
申请人
ADVANTEST CORPORATION
发明人
FROSIEN, JUERGEN, DR.
分类号
G01N23/203;G01N23/225;H01J37/28;H01J37/29;(IPC1-7):H01J37/29
主分类号
G01N23/203
代理机构
代理人
主权项
地址
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