发明名称 |
AKUSTISCHER SPIEGEL UND VERFAHREN ZU DESSEN HERSTELLUNG |
摘要 |
An acoustic mirror is described which is formed of at least one first insulating layer, a first metal layer disposed thereon, a second insulating layer disposed thereon and a second metal layer disposed thereon. An auxiliary layer is produced on the first insulating layer whereby a recess extending as far as the first insulating layer is created therein. The first metal layer is substantially deposited and removed by chemical/mechanical polishing until the parts of the first metal layer disposed outside the recess are no longer present. The second metal layer is also produced in a recess with the aid of chemical/mechanical polishing. More than two insulating layers and two metal layers can be provided. The first metal layer and the second metal layer can be produced in the same recess. |
申请公布号 |
AT297068(T) |
申请公布日期 |
2005.06.15 |
申请号 |
AT20000964249T |
申请日期 |
2000.09.28 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
AIGNER, ROBERT;ELBRECHT, LUEDER;MARKSTEINER, STEPHAN;SAENGER, ANNETTE;TIMME, HANS-JOERG |
分类号 |
A61B8/00;G10K11/20;H03H3/02;(IPC1-7):H03H3/02 |
主分类号 |
A61B8/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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