| 摘要 |
PROBLEM TO BE SOLVED: To improve workability by shortening the falling/rising time of a device and roller replacing/adjusting time and suppress the aged dislocation of rollers caused by use and a short life of a built-in bearing. SOLUTION: This conveying device moving in a vacuum container or between the vacuum container and a device in the atmosphere adjacent to the vacuum container is provided with a truck 11 of inverted recessed cross-sectional shape; first support rollers 12a arranged inside the truck 11 to hold the lateral direction to the proceeding direction of the truck 11; second support rollers arranged inside the truck 11 to support the load of the truck 11; and a guide rail 17 for guiding the traveling position of the truck 11. |
