Molecular pump and flange

摘要

The pump (1) has a casing (16) which encloses a stator and formed with a gas inlet port (6) and a gas discharge port (19). A shaft (11) supported by a bearing (20) within the casing, to support a rotor (24). A flange (61) is formed around the gas inlet port, and has a thin-walled portion that deforms when acted by shock generated during rotation of the rotor relative to the casing. The rotor is set opposite the stator. The shaft is rotated by a motor (10).