发明名称 Side channel pumping stage
摘要 <p>The side channel pump stage has pump-active structures fitted to shaft-mounted rotor elements (12) on both sides and consist of blades (16,18) projecting in the axial direction on at least one side and installed on one or more concentric rings. The blades of the rotor elements engage in one or more concentric channels (22a,24a,22b,24b) formed in stator elements (14a,14b). Gas inlet openings are separated from gas outlet openings by barriers. An independent claim is included for a method for the manufacture of rotor elements of a side channel pump stage entailing the drilling of holes (15), with the desired radius of the blades, in concentric protrusions which extend from the rotor disc in the axial direction.</p>
申请公布号 EP1541871(A2) 申请公布日期 2005.06.15
申请号 EP20040027043 申请日期 2004.11.13
申请人 PFEIFFER VACUUM GMBH 发明人 FAHRENBACH, PETER
分类号 F04D23/00;F04D17/16;(IPC1-7):F04D23/00 主分类号 F04D23/00
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