发明名称 |
Cylindrical magnetron target and spindle apparatus |
摘要 |
A cylindrical magnetron target and spindle attachment apparatus for affixing a cylindrical magnetron target to a rotatable support spindle. The attachment apparatus includes a target and a spindle. The target defines a receiving portion. The spindle has a spindle plug. The spindle plug is disposed within the receiving portion of the target. The attachment apparatus increases the speed and ease of removing and installing cylindrical rotating targets onto a support spindle.
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申请公布号 |
US6905579(B2) |
申请公布日期 |
2005.06.14 |
申请号 |
US20030365232 |
申请日期 |
2003.02.13 |
申请人 |
SPUTTERING COMPONENTS, INC. |
发明人 |
CROWLEY DANIEL T. |
分类号 |
H01J37/34;(IPC1-7):C23C14/35 |
主分类号 |
H01J37/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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