发明名称 |
System and method for ECM land erosion metrology |
摘要 |
A system and method for characterizing and measuring hydrodynamic grooves made by ECM processes is disclosed. The method includes a procedure for alignment of the work piece to the measurement apparatus as well as a technique for accurately reliably measuring the erosion pattern quickly. Additionally, the invention provides a system for characterizing and measuring the erosion of these grooves.
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申请公布号 |
US6904790(B2) |
申请公布日期 |
2005.06.14 |
申请号 |
US20030465742 |
申请日期 |
2003.06.18 |
申请人 |
SEAGATE TECHNOLOGY LLC |
发明人 |
ANANDA MYSORE VENKATACHALAN;GONZALEZ STEVE G.;HAKES CHRISTOPHER ROWE |
分类号 |
G01B21/30;F16C17/00;F16C33/10;G01B5/28;(IPC1-7):G01N17/00 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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