Semiconductor light receiving device in which optical and electric signal are propagated at matched velocities

摘要

A plurality of semiconductor devices are disposed in a line on the surface of a supporting substrate. Each semiconductor device is adapted to generate an electric signal depending on the intensity of incident light. Adjacent semiconductor devices are optically coupled by an interconnecting optical waveguide so that light can pass through the semiconductor device one by one in a direction from a first stage closest to an input end to a last stage. An electric signal transmission line is formed of a pair of conductors connected to the semiconductor devices so that the electric signal generated by the semiconductor devices can propagate. One conductor of the pair of conductors of the electric signal transmission line is formed so as to extend in the air above the supporting substrate between adjacent semiconductor devices.