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发明名称
THE COPPER METAL LAYER IN SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要
申请公布号
KR20050054116(A)
申请公布日期
2005.06.10
申请号
KR20030087440
申请日期
2003.12.04
申请人
DONGBUANAM SEMICONDUCTOR INC.
发明人
LEE, HAN CHOON;PARK, JIN WOO
分类号
H01L21/28;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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