发明名称 JET SINGULATION OF A SUBSTRATE
摘要 <p>Techniques for singulating a substrate (12) into a plurality of component parts is disclosed. The singulation techniques include generating a jet stream (11) in order to cut through large components (12) so as to produce smaller components. The techniques are particularly suitable for singulating surface mount devices such as chip scale packages, ball grid arrays (BGA), flip chips, lead less packages (QFN) and the like. The techniques are also suitable for singulating photonic devices.</p>
申请公布号 KR20050054944(A) 申请公布日期 2005.06.10
申请号 KR20057004371 申请日期 2005.03.14
申请人 TOWA-INTERCON TECHNOLOGY, INC. 发明人 JIANG SHAN;SEO, SE ILL;TAY STEVEN
分类号 B24C5/02;B23Q3/08;B24C1/04;B24C7/00;B24C9/00;B26F3/00;H01L21/00;H01L21/301;H01L21/304;H01L21/48;H01L21/78;H05K3/00;(IPC1-7):H01L21/78 主分类号 B24C5/02
代理机构 代理人
主权项
地址