| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical sensor integrated circuit of a low detection error in a photodetection signal, even when a sealing material is brought into a moisture absorbed condition. SOLUTION: This optical sensor is provided with the integrated circuit constituted on the same sensor substrate with a photoreception element for receiving incident light to be converted into an electric signal, and an arithmetic processing circuit for amplifying/processing the photoreceived/converted electric signal, and having an interlayer insulation film for protecting the circuit elements, and a light shielding metal film arranged on the integrated circuit and having an opening part on a photoreception face of the photoreception element, and for coating and shielding-treating at least a portion where the arithmetic processing circuit is affected unfavorably by the incident light. At least one side out of one portion of the light shielding metal film including the opening part and a peripheral part of the opening part or the whole face thereof is coated with a moisture-impermeable insulation film to insulate the light shielding metal film from an interface S2 opposed to a photoreception face S1 via the interlayer insulation film 15 and formed with respect to sealing material. COPYRIGHT: (C)2005,JPO&NCIPI |
