| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature-measuring apparatus having a simple structure, capable of performing temperature measurement with high precision, without being influenced by electromagnetic waves which becomes disturbances. SOLUTION: This temperature measuring apparatus is provided with an infrared-type temperature measurement unit 6 for measuring the temperature of a board 10 in a predetermined processing tank. Between the board 10 and the measurement unit 6, a shielding section 8, made of a material which shuts infrared radiation off and constituted so as to be capable of touching the board 10 is provided, and the device is formed so as to measure the temperature of the shielding section 8 by the measurement unit 6. COPYRIGHT: (C)2005,JPO&NCIPI
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