LIQUID LEVEL CONTROL METHOD FOR GAS TREATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To solve the problem that it is necessary to provide a wasteful space on the upper part of an air bubble container is required in order to install a pressure detection seat in the use of the air bubble container when a flow rate of supplied gas is remarkably changed.

SOLUTION: In the air bubble forming container in which air bubbles are produced, the height of a real liquid level (air bubble liquid level) in the air bubble producing container is estimated, and the estimated height is used for controlling the height of liquid level to control the height of the real liquid level (air bubble liquid level) in the air bubble producing container.

COPYRIGHT: (C)2005,JPO&NCIPI