| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a system for determining process uniformity. SOLUTION: This method includes a step of selecting a plurality of sample regions. The plurality of the sample regions include a plurality of features to be processed, and each of the plurality of the sample regions includes at least one of a plurality of processed features. Each of the plurality of processed features is originated from at least one production process. Moreover, the method includes a step of obtaining a plurality of electron microscopic images associated respectively with the plurality of sample regions, a step of processing the information associated with the plurality of electron microscopic images, and a step of determining a plurality of first grayscale values of the plurality of sample regions. Furthermore, the method includes a step of processing the information associated with the plurality of first grayscale values and a step of determining whether or not the at least one production process is uniform. COPYRIGHT: (C)2005,JPO&NCIPI
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