发明名称 THIN FILM FORMING METHOD, MANUFACTURING METHOD OF DEVICE, MANUFACTURING METHOD OF ELECTRO-OPTICAL DEVICE AND ELECTRONIC DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a thin film forming method using an ink jet technique and suitable for micronization or the enhancement of film physical properties. <P>SOLUTION: In a drying process of a liquid droplet, a temperature deference is imparted to the interior of the liquid droplet while pinning the edge part of the liquid droplet to cause a convection. At this time, the flow direction of a liquid on the surface of the liquid droplet is set, for example, so as to go toward the top part of the liquid droplet from the outer peripheral part of the bottom part of the liquid droplet. By this method, fine particles piled up on the edge part of the liquid droplet at random are stirred and rearranged to form a two-dimensional colloidal crystal film having the closest packing structure. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005144260(A) 申请公布日期 2005.06.09
申请号 JP20030382525 申请日期 2003.11.12
申请人 SEIKO EPSON CORP 发明人 MASUDA TAKASHI
分类号 G02B5/20;B05D3/02;B05D7/00;H01L51/50;H05B33/10;H05B33/14;(IPC1-7):B05D3/02 主分类号 G02B5/20
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