| 摘要 |
PROBLEM TO BE SOLVED: To realize all of high mechanical strength, high toughness, high temperature stability, high chemical resistance and high conductivity required at the time when an electrodeposited alloy is used as the members for micromachines and microcomponents. SOLUTION: In a metallic thin sheet produced by using electrodeposition method, two or more metallic film layers having different compositions of a metallic film layer (former) having excellent mechanical properties or chemical resistance and a metallic film layer (latter), e.g., having electrical properties such as conductivity are tightly stuck on an atomic level so as to be integrally formed directly, or in such a manner that the compositions are tilted, or in such a manner that a sticking buffer layer such as a copper thin film is formed therebetween. For this purpose, the former is first electrodeposited on an electrode substrate, next, the latter is electrodeposited so as to be stacked thereon, and then, the former is again electrodeposited on the latter. They are successively electrodeposited on the electrode substrate so that the thickness of the former film layers sandwiching from both the faces of the latter is made equal at both the faces of the latter, and finally, the substrate is dissolved. Thus, the member for micromachines and microcomponents having excellent mechanical properties or chemical resistance and also having excellent electrical properties is provided. COPYRIGHT: (C)2005,JPO&NCIPI |
