ELECTROSTATIC ACTUATOR, OPTICAL SWITCH AND OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic actuator, an optical switch and an optical device which are compact and highly integrated. SOLUTION: The electrostatic actuator 18 has a beam-shaped member 6, a fixed electrode 8 and a voltage source 11 which applies an electric voltage between the beam-shaped member 6 and the fixed electrode 8. Electrostatic force is generated between the beam-shaped member 6 and the fixed electrode 8 by applying the electric voltage with the voltage source 11. Further, a plurality of electrode parts 7 which are arranged in a comb shape are provided on the beam-shaped member 6 and a plurality of electrode parts 9 arranged in a comb shape and inserted between respective electrode parts 7 are provided on the fixed electrode 8. Protruded parts 7a and 9a are provided on the electrode parts 7 and 9. The protruded parts maybe provided at least at the electrode parts 7 of the beam-shaped member (movable electrode) 6. COPYRIGHT: (C)2005,JPO&NCIPI