| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply integration unit which facilitates line extension. SOLUTION: The gas supply integration unit is equipped with a plurality of gas units in which a first hand valve 11 arranged in egress passage, a second hand valve 13 arranged at a position which links continuously the first hand valve 11, and a process gas common passage 15; and a third hand valve 14 arranged at a position which links continuously the first hand valve 11 and a purge gas common passage 16 are connected integrally and serially with a passage block. In the gas supply integration unit, a process gas common passage end hand valve 22 which links continuously with the end of a process gas common passage 15, and a purge gas common passage end hand valve 23 which links continuously with the end of the purge gas common passage 16 are installed. COPYRIGHT: (C)2005,JPO&NCIPI
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