GLOW DISCHARGE EMISSION ANALYZER, FEED METHOD FOR GLOW DISCHARGE, GLOW DISCHARGE EMISSION ANALYZING METHOD, AND POWER SUPPLY DEVICE

摘要

PROBLEM TO BE SOLVED: To analize a material easily dissolved or destructed by glow discharge. SOLUTION: This glow discharge emission analyzer 1 is equipped with a generator 4 capable of feeding high frequency power by a continuous feed mode and an intermittent feed mode. When the intermittent feed mode is set, the generator 4 changes over the feed of power and the stop of the feed of power alternately corresponding to the setting of an analysis control part 8 to intermittently apply voltage to a sample S. In this intermittent feed mode, feed frequency and a feed occupying ratio can be appropriately regulated and the average feed quantity of power is lowered as compared with the continuous feed mode to reduce the load to the sample due to feed and the effect of sputtering. COPYRIGHT: (C)2005,JPO&NCIPI