| 摘要 |
PROBLEM TO BE SOLVED: To perform easily and stably shape measurement of the whole measuring region on the test surface by moving successively an aperture for restricting a light flux range of measuring light toward the test surface in the light flux of the measuring light, performing inclination adjustment of the test surface based on the forming position of an alignment light figure of test surface light reflected from an irradiation region of the measuring light, and thereby acquiring successively interference fringes classified by the region. SOLUTION: The aperture 26 is moved so that the irradiation region of the measuring light is dislocated successively over the whole region on the test surface 27a. The inclination adjustment of the test surface 27a is performed at each movement based on the forming position of the alignment light figure of the test surface light, and each shape classified by the region on the test surface 27a is determined successively based on the interference fringes classified by the region acquired thereby. Each acquired shape classified by the region is connected by an aperture synthesis method, to thereby acquire the shape of the whole measuring region on the test surface 27a. COPYRIGHT: (C)2005,JPO&NCIPI
|
