SILICON INGOT AND HEAVY METAL CONTAMINATION EVALUATING METHOD OF SILICON WAFER

摘要

PROBLEM TO BE SOLVED: To provide a silicon ingot and a heavy metal contamination evaluating method for noncontactly and conveniently evaluating a metal contamination in a short time. SOLUTION: The method includes a process for calculating interface level densities Ditof a plurality of transition metals from a plurality of reference samples of various transition metals and creating a database including a plurality of the interface level densities Dit, a process for calculating the interface level density Ditfrom a measurement sample, and a process for comparing the interface level density Ditof the measurement sample with the interface level densities Ditof a plurality of the transition metals included in the DB (database), and identifying that the transition metal contaminating the measurement sample is the transition metal having the same or approximate pattern in the DB when the interface level density Ditof the measurement sample has the same or approximate pattern of one of the interface level densities Ditin the DB. COPYRIGHT: (C)2005,JPO&NCIPI