发明名称 |
Optical tunable filter and method of manufacturing the same |
摘要 |
An optical tunable filter is provided including a first substrate having light transmission properties and having a movable part and a supporting member that movably supports the movable part and having a smaller thickness than the movable part, a second substrate having light transmission properties and opposed to the first substrate, a first gap and a second gap provided between the movable part and the second substrate, an interference part causing interference between the movable part and the second substrate through the second gap and a drive member changing an interval of the second gap by moving the movable part to the second substrate by making use of the first gap.
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申请公布号 |
US2005122191(A1) |
申请公布日期 |
2005.06.09 |
申请号 |
US20040002441 |
申请日期 |
2004.12.02 |
申请人 |
NAKAMURA RYOSUKE;KAMISUKI SHINICHI;MURATA AKIHIRO;YODA MITSUHIRO |
发明人 |
NAKAMURA RYOSUKE;KAMISUKI SHINICHI;MURATA AKIHIRO;YODA MITSUHIRO |
分类号 |
B81B3/00;B81C1/00;G01J3/26;G02B5/20;G02B5/28;G02B26/00;H01P1/20;(IPC1-7):H01P1/20 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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