| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To work at a low cost a hole including an excellent working surface on a passivation film in steps for manufacturing a solar cell having a PERC structure. <P>SOLUTION: A comparatively inexpensive laser oscillator of Nd:YAG layer or Nd:YVO layer is used to work a hole 17 by irradiating a passivation film (insulating film) 6 having the PERC structure with output laser light (e.g. second higher harmonic wave or third higher harmonic wave of Nd:YAG laser) from the laser oscillator in the state of uniform energy distribution in an optical image forming system, thereby reducing manufacture costs of the solar cell. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
