SEMICONDUCTOR ELEMENT EQUIPPED WITH ALIGNMENT KEY AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor element comprising an alignment key, and further provide a manufacturing method thereof.

SOLUTION: A semiconductor element comprises a semiconductor substrate equipped with a cell region alignment key. A device separation film for defining a cell activation region is arranged in the cell region. It is arranged such that a cell charge recording layer pattern crosses the cell active region. An alignment charge recording layer pattern is arranged on the alignment key region. An alignment trench self-aligned with the alignment charge recording layer is formed in the alignment key region.

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