| 摘要 |
PROBLEM TO BE SOLVED: To measure optical characteristics of a test optical system with a high accuracy. SOLUTION: An optical system is arranged in a positional relationship wherein two polarization components which are included in a light emitted from the test optical system, and are perpendicular to each other in a polarizing direction are respectively reflected by at least a pair of specified reflection optical element (mirror 101 or 107) which are paired to each other while the polarization components reach CCDs 113a, 113b. Therefore, the polarization components which are paid attention to are incident in a state that, with respect to one reflection optical element of the paired reflection optical element, its vibration direction is parallel (or perpendicular) to the incident face of a light with respect to its reflection face, and the polarization components are incident in a perpendicular (or parallel) state with respect to the other reflection optical element. Namely, as a strong light reaches the CCD in accordance with the product of a reflection factor for the light of P polarization components of the specified reflection light element and a reflection factor for a light of S polarization components, no deterioration occurs in the measuring accuracy of the optical characteristics caused by polarization characteristics of the reflection optical element. COPYRIGHT: (C)2005,JPO&NCIPI
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