SPLIT REACTION MASS SUPPORTED BY FLEXIBLE PLATE

摘要

PROBLEM TO BE SOLVED: To provide an apparatus or a system for stabilizing a scanning system during a lithography treatment. SOLUTION: A base frame 305 comprising a first end having a first coupling region and a second end having a second coupling region is provided. At least one reaction mass 310 comprising a first end having a first coupling region and a second end having a second coupling region is provided. At least one first bearing assembly is provided. The first bearing assembly makes one of first coupling fields of at least one reaction mass coupled to the first coupling region of the base frame. At least one second bearing assembly is provided. The second bearing assembly makes one of second coupling fields of at least one reaction mass coupled to the second coupling region of the base frame. COPYRIGHT: (C)2005,JPO&NCIPI