| 摘要 |
PROBLEM TO BE SOLVED: To provide an electroconductive laminated film which is simply and inexpensively usable for the electric wiring and electrode of many electron devices, and to provide a forming method therefor. SOLUTION: The electroconductive laminated film is made of layered metallic aluminum films and ruthenium-containing electroconductive films. The electroconductive laminated film is formed by forming the electroconductive film by applying an organometal complex of ruthenium onto a substrate and subsequently heat-treating it, and forming the metallic aluminum film through applying the complex of an amine compound and an alane onto the electroconductive film and subsequently heating and/or optically treating it, or by sputtering or vapor-depositing aluminum. COPYRIGHT: (C)2005,JPO&NCIPI
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