| 摘要 |
PROBLEM TO BE SOLVED: To realize high corrosion resistance and high pressure resistance by using a material having corrosion resistance and strength. SOLUTION: The pressure sensor comprises a pressure sensing part including a measuring diaphragm, one face side of the sensing part making contact with a measuring fluid, and a support part provided on the other face side of the pressure sensing part to constitute a reference pressure chamber with the measuring diaphragm. The pressure sensing part is composed of a cobalt-nickel alloy material. COPYRIGHT: (C)2005,JPO&NCIPI
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