| 摘要 |
A direct-acting actuator is provided comprising a stator section ( 16 ), an attachment section ( 6 ) secured to the stator section, micro-beams ( 8, 10 ) extending from the attachment section, a rotor section ( 12 ) supported for swing motion by the micro-beams, a permanent magnet ( 18 ) disposed in the stator section, and a coil ( 4 ) disposed in the rotor section. Electric current is conducted through the coil in the magnetic field created by the permanent magnet for causing the micro-beams to be displaced for inducing swing motion of the rotor section. The actuator can be assembled to a small size, typically a width of 1-10 mm, a length of 1-10 mm, and a height of 0.1-5 mm.
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