发明名称 |
METHOD AND SYSTEM FOR ELECTRONIC DETECTION OF MECHANICAL PERTURBATIONS USING BIMOS READOUTS |
摘要 |
A sensor for detecting mechanical perturbations represented by a change in an electrical signal includes a structure such as a cantilever, membrane, etc. and a field effect transistor such as a MOSFET embedded in the structure. The drain current of the embedded transistor changes with mechanical perturbations in the structure caused, for example, by a bio-chemical interaction being sensed. A scanning probe microscope utilizes the embedded MOSFET with a BiMOS actuator. |
申请公布号 |
WO2005053001(A2) |
申请公布日期 |
2005.06.09 |
申请号 |
WO2004US39685 |
申请日期 |
2004.11.23 |
申请人 |
NORTHWESTERN UNIVERSITY;SHEKHAWAT, GAJENDRA;DRAVID, VINAYAK, P. |
发明人 |
SHEKHAWAT, GAJENDRA;DRAVID, VINAYAK, P. |
分类号 |
G01N27/00;G01N27/414;H01L |
主分类号 |
G01N27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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