| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a siloxane compound-containing gas refiner capable of efficiently removing a siloxane compound from a siloxane compound-containing gas at a low cost. <P>SOLUTION: In this siloxane compound-containing gas refiner 20, exchangeable vessels 1a, 1b constituted so that an adsorbent adsorbing the siloxane compound can be exchanged, are connected in series through a pipe 9 connecting both vessels in series, and any of them can be freely switched to an upstream side only by operation of a selector valve. Therefore, only the exhausted exchangeable vessel 1a in the upstream side can be exchanged, and the exchangeable vessel 1b that has been disposed in the downstream side can be used as the upstream side one thereafter. This makes the adsorbent to be used very effectively. As the passage can be switched only by the valve operation after the exchange of the vessel, even a non-expert technician can easily exchange the exchangeable vessels 1a, 1b. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
