MANUFACTURING METHOD OF INKJET RECORDING HEAD, AND INKJET RECORDING HEAD

摘要

PROBLEM TO BE SOLVED: To improve etching resistance by applying a protective film material after filling a dilute liquid. SOLUTION: The method of manufacturing an inkjet recording head having discharge openings to discharge an ink including a process of etching by using an etching liquid comprises a step of forming a protective film to protect a device face having discharge openings to discharge an ink against the etching liquid by applying and drying a liquid protective film diluted by a diluent solvent and a process of applying a liquid protective film (cyclic rubber-based coating material) with the discharge openings previously filled with a xylene as a diluent solvent. COPYRIGHT: (C)2005,JPO&NCIPI