Measurement system of three-dimensional shape of transparent thin film using acousto-optic tunable filter

摘要

A system for measuring the three-dimensional shape of a transparent thin film using an acousto-optic tunable filter. The system can independently obtain thickness information and shape information about a measurement object having a patterned structure through independent measurements by modes according to whether a blocking plate selectively blocks white light irradiated on a reference mirror plane or not. According to the system for measuring the three-dimensional shape of a transparent thin film using an acousto-optic tunable filter of the present invention, thickness information and shape information about a measurement object including a thin film can be independently measured in two different measurement modes according to whether the blocking plate blocks white light or not, so that three-dimensional shape information of the measurement object can be obtained rapidly.