| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a power supply device for generating plasma inducing plasma by generating glow discharge in gas, prevented from generation of arc discharge by creating a stable plasma environment. <P>SOLUTION: A switching FET 10 connected to a primary winding of a converter transformer 9 is PWM controlled by a PWM control part and outputs a high voltage. The output voltage is restricted by narrowing a duty of a PWM signal depending on an output signal of an operational amplifier 18 turned on, for example, when the output voltage exceeds 1,300 V, and an output current is restricted by narrowing the duty of the PWM signal depending on the output signal of an operational amplifier 23 turned on, for example, when the output current exceeds 1.2 A, and a standard input voltage of the operational amplifier 23 is lowered by the output of an operational amplifier 28 turned on, for example, when the output voltage becomes 40 V or less. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
