CLEANING METHOD AND CLEANING METHOD OF ELECTRONIC COMPONENT

摘要

PROBLEM TO BE SOLVED: To provide a cleaning method which enables the effective filtration of contaminations, such as particles on the surface of a workpiece to be cleaned. SOLUTION: A cleaning solution is prepared by dissolving oxygen in deionized water which degassing treatment is carried out. The workpiece to be cleaned is cleaned by giving ultrasonic vibration to the cleaning solution. COPYRIGHT: (C)2005,JPO&NCIPI