发明名称 |
Multi-axes, sub-micron positioner |
摘要 |
A positioner for positioning an object with sub-micron resolution is disclosed. The positioner includes a first stage having a first stage housing and adapted to provide dual-axis motion for coarse positioning of the object, and a second stage secured substantially within the first stage housing and adapted to provide dual-axis motion for fine positioning of the object. The second stage comprises a second stage housing on which the object may be removably secured. The first stage is preferably a stepper motor or servo motor and the second stage is a piezoelectric actuator. The first stage housing preferably includes air bearings positioned on a surface thereof.
|
申请公布号 |
US2005122079(A1) |
申请公布日期 |
2005.06.09 |
申请号 |
US20040957938 |
申请日期 |
2004.10.04 |
申请人 |
HEILIG JOHN A.;KAFAI BAHRAM B.;TRAMMELL GLENN S. |
发明人 |
HEILIG JOHN A.;KAFAI BAHRAM B.;TRAMMELL GLENN S. |
分类号 |
H01L41/08;H01L41/09;H02N2/00;H02P1/00;(IPC1-7):H02P1/00 |
主分类号 |
H01L41/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|