USE OF OPTICAL FOURIER TRANSFORM FOR DIMENSIONAL CONTROL IN MICROELECTRONICS

摘要

The invention concerns a device for measuring dimensional or structural characteristics of an object, comprising: means (2) for forming an image of the optical Fourier transform of an elementary surface of the object in the image focal plane; processing means (26) for producing data concerning at least one dimensional and/or structural characteristic of the object based on the data supplied by the detecting means.