| 摘要 |
PROBLEM TO BE SOLVED: To independently adjust the positional deviation and angular deviation of a luminous flux reaching the entrance of the main body of an aligner from, for example, an excimer laser light source without using any parallel flat plate as a halving. SOLUTION: Illumination optical apparatus is provided with a relaying optical system (5) disposed in the optical path between a light source (1) and a prescribed surface (7a); a first reflecting member (4) which is positioned at an intermediate position (P1) which is optically conjugated with the prescribed surface (7a) with respect to the relaying optical system (5) or its vicinity, and can rotate around a prescribed axial line; and a second reflecting member (2) which is positioned separately from the conjugated position (1a) of the intermediate position (P1) by a prescribed distance in the optical path between the intermediate position (P1) and light source (1), and can rotate around the prescribed axial line. The device is also provided with a second relaying optical system (3) which is used for arranging the intermediate position (P1) and light source (1) in an almost optically conjugated state. COPYRIGHT: (C)2005,JPO&NCIPI
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