LIGHT-EMITTING DEVICE AND METHOD FOR MANUFACTURING LIGHT-EMITTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a light-emitting device improved in internal quantum efficiency, consuming less power, having high luminance and high reliability. SOLUTION: This method for manufacturing a light-emitting device comprises the steps of: forming a conductive translucent oxide layer containing a conductive translucent oxide material and silicon oxide; forming a barrier layer in which density of the silicon oxide is higher than that in the conductive translucent oxide layer over the conductive translucent oxide layer; forming a positive electrode having the conductive translucent oxide layer and the barrier layer; heating the positive electrode under a vacuum environment; forming an electroluminescent layer over the heated positive electrode; and forming a negative electrode over the electroluminescent layer. The device is characterized in that the barrier layer is formed between the electroluminescent layer and the conductive translucent oxide layer. COPYRIGHT: (C)2005,JPO&NCIPI