发明名称 |
Stocker utilization self-balancing system and method |
摘要 |
A method for operating a plurality of stockers, comprises the steps of: monitoring utilization of the plurality of stockers, each stocker capable of storing a plurality of wafer, LCD or reticle containers; and automatically transferring a first wafer, LCD or reticle container from a first one of the stockers to a second one of the stockers if the utilization of the first stocker is greater than a predetermined thereshold.
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申请公布号 |
US2005125095(A1) |
申请公布日期 |
2005.06.09 |
申请号 |
US20030731533 |
申请日期 |
2003.12.09 |
申请人 |
CHEN YU-CHI;LAI WEI-YU;PENG YUNG-CHANG |
发明人 |
CHEN YU-CHI;LAI WEI-YU;PENG YUNG-CHANG |
分类号 |
G05B19/418;G06F7/00;H01L21/00;H01L21/677;(IPC1-7):G06F7/00 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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