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发明名称
Mustererzeugungsverfahren unter Verwendung einer inorganischen Antireflexionsschicht
摘要
申请公布号
DE60103398(T2)
申请公布日期
2005.06.09
申请号
DE20016003398T
申请日期
2001.06.20
申请人
INFINEON TECHNOLOGIES AG;INTERNATIONAL BUSINESS MACHINES CORP., ARMONK
发明人
LEE, GILL YONG;HALLE, SCOTT D.;BEINTNER, JOCHEN
分类号
G03F7/09;H01L21/027;H01L21/311;H01L21/314;H01L21/8242;(IPC1-7):H01L21/027;H01L21/824
主分类号
G03F7/09
代理机构
代理人
主权项
地址
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