| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining device capable of preventing the unevenness of machining due to use of a laser beam source deteriorated in beam quality and the sagging at a machining edge due to use of an inexpensive laser beam source. <P>SOLUTION: In the laser beam machining device 10 which reduces an image of a slit 15 through a third lens 16 and a fourth lens 17 and forms the image on a work 18, the laser beam from the laser beam source 11 is made incident on the slit 15 through a first lens 12 which perform Fourier transform, a transmission type phase amplitude modulator 13 (or a reflection type phase amplitude modulator 23) and a second lens 14 which performs reverse Fourie transform. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
